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Surface Physics and Material Science


Ion Beam Systems


Ion Beam Systems (SIMS) Ion Beam Systems (SIMS)
Description *
Manufacturer Hiden Analytical Limited (UK)
Installed on 30.11.1999
Type Triple Quadrupole
Mode Static & Dynamic SIMS
Mass handling limit 0 to 1000 amu
Depth resolution ~ 50 Å
Ion Gun Ar+ and O+ Gun ( IG 20 )

* Beam spot dia. = 100 µ-m
* Max current density at center = 4.5 mA/cm2
* Energy range = 5 keV

Cs Ion Gun (IG 5C)

* Beam spot dia. =
* Max. Current density at center =
* Energy range = 5 keV
EQS Analyser 45 degree electrostatic field energy filter
Mass Analysis Triple Quadrupole
Detector Channeltron
Ion Beam Systems (SIMS) Ion Beam Systems (SIMS)


Last Updated on Wednesday, 17 August 2016 14:22
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