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Surface Physics and Material Science



HRSEM-CL Facility

HRSEM-CL Facility
Description Cathodoluminescence (CL) is the emission of light (from UV to IR regime) from a material as a result of excitation by electron beam. CL augmented in a high resolution scanning electron microscope (HRSEM) fitted with a spectrometer, light collection and detection system offers a powerful material analysis tool to obtain simultaneous acquisition of CL spectroscopy and imaging data with high spatial resolution and depth resolution from a luminescent material in addition to other available morphological information of the SEM mode of operation.
Manufacturer of HRSEM Carl Zeiss NTS GmbH, Germany
Manufacturer of CL set up Gatan UK
Model of HRSEM Carl Zeiss Supra 40
Model of CL Gatan MonoCL3
Installation March, 2010 at the ground floor of Phase IV building
Important features of the CL system

* Direct optical coupling to chamber mounted monochromator 
* Retractable, detachable diamond turned parabolid mirror 
* Panchromatic and monochromatic mode of imaging 
* Micrometer slits for controlling spectral resolution and band pass 
* Peltier-cooled high sensitivity photomultiplier tube (HSPMT) sensitive in the range 165 nm to 930 nm wavelength of CL emission with integral pre-amplifier and 1200 lines/mm grating blazed at 500 nm 
* LN2 cooled Ge detector sensitive in the range 800 nm to 1800 nm and an additioanl grating of 600 lines/mm blazed at 1000 nm 
* Liquid He and Liquid N2 flow based sample cooling stage for imaging and spectroscopic work in the temperature range 6K - 300K.


Important features of the HRSEM system * High stability Schottky type field emitter 
* Resolution : 1.0 nm at 20 kV; 1.3 nm at 15 kV; 2.1 nm at 1 kV 
* Acceleration voltage : 100 V to 30 kV 
* Annular In-lens SE detector and chamber SE detector 
* High resolution BSD detector (retractable under vacuum) 
* Ion getter pumped column and TMP with rotary backing having oil traps, oil mist filter to gurantee contamination free vacuum environment in the analysis chamber 


Last Updated on Wednesday, 17 August 2016 14:24
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