Facilities
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Ion Beam Systems
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SIMS
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| Description |
* |
| Manufacturer |
Hiden Analytical Limited (UK) |
| Installed on |
30.11.1999 |
| Type |
Triple Quadrupole |
| Mode |
Static & Dynamic SIMS |
| Mass handling limit |
0 to 1000 amu |
| Depth resolution |
~ 50 Å |
| Ion Gun |
Ar+ and O+ Gun ( IG 20 )
* Beam spot dia. = 100 µ-m
* Max current density at center = 4.5 mA/cm2
* Energy range = 5 keV
Cs Ion Gun (IG 5C)
* Beam spot dia. =
* Max. Current density at center =
* Energy range = 5 keV |
| EQS Analyser |
45 degree electrostatic field energy filter |
| Mass Analysis |
Triple Quadrupole |
| Detector |
Channeltron |
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Last Updated on Wednesday, 17 August 2016 14:22
