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Department of Atomic Energy, Govt. of India
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Surface Physics and Material Science

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Growth

Magnetron Sputtering Unit

  Magnetron Sputtering UnitMagnetron Sputtering Unit
Description somthing
Manufacturer Pfeiffer Vacuum (Germany)
Type DC/RF Magnetron Sputtering
Model PLS - 500
Geometry Planer
Source Metal/Semiconductor
No. of Source 3 (2 DC + 1 RF)
Size of Source 50 mm (dia)
Substrate Any plane material
Power (DC) 10 - 500 watt
Power (RF) 10 - 300 watt
Base Pressure 10(-7) mbar

 

Last Updated on Wednesday, 17 August 2016 14:15
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