Facilities
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Growth
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Magnetron Sputtering Unit
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| Description |
somthing |
| Manufacturer |
Pfeiffer Vacuum (Germany) |
| Type |
DC/RF Magnetron Sputtering |
| Model |
PLS - 500 |
| Geometry |
Planer |
| Source |
Metal/Semiconductor |
| No. of Source |
3 (2 DC + 1 RF) |
| Size of Source |
50 mm (dia) |
| Substrate |
Any plane material |
| Power (DC) |
10 - 500 watt |
| Power (RF) |
10 - 300 watt |
| Base Pressure |
10(-7) mbar |
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Last Updated on Wednesday, 17 August 2016 14:15
