SAHA INSTITUTE OF NUCLEAR PHYSICS
Department of Atomic Energy, Govt. of India
FACILITIES
| Growth | Sputtering system |
 |
|
| Description | DC and RF sputtering system |
| Manufacturer | Korea Vacuum Technologies Company Limited, South Korea |
| Model | Nil |
| Installation place & date | Room No. # 125 & July, 2006 |
| Key Features | Two DC and one RF target Deposition pressure control Substrate heating (500 °C) Ar, O2 and N2 gases |
| Users | SINP |